sensitivity of micro-phone

Aiming at the lower cost, high sensitivity and high integration micro vibration sensor, the basic researches on the design and fabrication process of polymer micro-opto-mechanical vibration sensor based MEMS techniques are done.

论文以实现低成本、高灵敏度、高集成度的微振动传感器为目标，开展了基于MEMS技术的聚合物微光机械振动传感器设计及制作工艺的基础性研究。

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Methods The effect of different concentration of virus and species of red blood cells, as well as kind and concentration of agarose on testing sensitivity of SRH was determined. Meanwhile the sensitivity and specificity of this method were compared with those of micro-neutralization test.

方法比较不同浓度，不同品种红细胞，琼脂糖种类和浓度对测定敏感性的影响，以及对该法的敏感性和特异性与微量中和试验进行了比较。

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ZnO piezoelectric thin film pressure sensor by MEMS fabrication has the advantage of high sensitivity and miniaturization. It is difficult to make the preparation process of the composite micro-cantilever sensor, and there are compatibility technology problems between the layers.

采用MEMS工艺制作的ZnO压电薄膜压力传感器，具有体积小、易集成、灵敏度和信噪比高等优点。但是复合微悬臂梁式传感器制备工艺较难，各层薄膜工艺存在兼容性问题。

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One set is the calibration system of the micro-force sensor, which is used for the deflection sensitivity measurement and the force sensitivity calibration.

一套为传感器的标定装置，其作用是完成对微力传感器偏转灵敏度的测量和力灵敏度的标定。

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A designed method of micro vibrational acceleration measuring probe is presented. It can eliminate temperature noise and interference of transverse sensitivity. The probe enhances sensitivity and resolution.

提出了一种新颖的微弱振动加速度测量探头的设计方法，这种方法可有效地消除信号传感中的温度噪声，降低横向灵敏度干扰，提高测量灵敏度和分辨率。

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